Aluminum Nitride (AlN) Components

With high thermal conductivity, high wear and corrosion resistance, Aluminum Nitride (AlN) is the most ideal material for the semiconductor and medical industries. Typical applications include: heaters, electrostatic chucks, susceptors, clamp rings, cover plates and MRI equipment. Based on a depth of material engineering and development, MARUWA offers a wide range of technical capabilities and dependable mass-production capacity to meet customer’s requirements in the most advanced fields of semiconductor and medical applications.

List of Products

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Aluminum Nitride (AlN) Components

Semiconductor manufacturing equipment (heaters, electrostatic chucks, susceptors, clamps rings, cover plates) and medical equipment