Alumina | Al2O3
Alumina substrates are produced under severe quality control with carefully selected high-purity alumina materials that ensures stable quality and excellent characteristics.
Material Characteristics for Alumina Substrates (Al2O3), Zirconia Toughened Alumina Substrates ( Al2O3/ZrO2), Aluminium Nitride Substrates (AlN), and Silicon Nitride (Si3N4)
Condition | Unit | Al2O3 | Al2O3/ZrO2 | AlN | Si3N4 | |||||||
AS970 | HA-96-2 | HBS | HRA | HA-996 | ZTA | HRZ | AN-170 | SN-90 | ||||
Material | - | - | 96.5% | 96% | 96.5% | 96% | 99.6% | Al2O3/ZrO2 | Al2O3/ZrO2 | AlN | Si3N4 | |
Color | - | - | White | White | White | White | White | White | White | Gray | Gray | |
Bulk density | - | g/㎤ | 3.74 | 3.75 | 3.75 | 3.60 | 3.90 | 4.00 | 3.85 | 3.30 | 3.22 | |
Surface roughness Ra | - | µm | 0.4 | 0.4 | 0.3 | 0.3 | 0.1 | 0.2 | 0.2 | 0.2 | 0.4 | |
Reflectivity | 0.3-0.4mmt | % | 70 | 70 | 70 | 85 | 75 | 80 | 87 | 35 | - | |
0.8-1.0mmt | 80 | 80 | 80 | 95 | 85 | 90 | 97 | 25 | - | |||
Mechanical | Bending strength | 3-point method | MPa | 450 | 400 | 500 | 370 | 470 | 700 | 550 | 450 | 800 |
Modulus of elasticity | - | GPa | 330 | 330 | 330 | - | 330 | 310 | - | 320 | 310 | |
Vickers hardness | - | GPa | 14 | 14 | 14 | - | 16 | 15 | 14 | 11 | 15 | |
Fracture toughness | IF method | MPa・m1/2 | 3.0 | 3.0 | - | - | - | 3.5 | - | 3.0 | 6.5 | |
Thermal | Coefficient of thermal expansion | 40-400°C | 10-6/K | 6.7 | 6.7 | 6.7 | 6.7 | 6.8 | 7.1 | 7.1 | 4.6 | 2.6 |
40-800°C | 7.8 | 7.8 | 7.8 | 7.8 | 7.9 | 8.0 | 8.0 | 5.2 | 3.1 | |||
Thermal conductivity | 25°C | W/(m・K) | 24 | 24 | 24 | 20 | 29 | 27 | 23 | 180 | 85 | |
300°C | 12 | 12 | 12 | - | 13 | 16 | - | 120 | - | |||
Specific heat | 25°C | J/(㎏・K) | 750 | 750 | 750 | 750 | 780 | 720 | 720 | 720 | 680 | |
Electrical | Dielectric constant | 1MHz | - | 9.8 | 9.8 | 9.8 | - | 9.9 | 10.2 | - | 8.5 | 7.8 |
Dielectric loss factor | 1MHz | 10-3 | 0.2 | 0.2 | 0.2 | - | 0.2 | 0.2 | - | 0.3 | 0.4 | |
Volume resistivity | 25°C | Ω・㎝ | >1014 | >1014 | >1014 | >1014 | >1014 | >1014 | >1014 | >1014 | >1014 | |
Breakdown strength | DC | ㎸/㎜ | >15 | >15 | >15 | >15 | >15 | >15 | >15 | >15 | >15 |